Group work of distributed microactuators

  title={Group work of distributed microactuators},
  author={Hiroyuki Fujita and Manabu Ataka and Satoshi Konishi},
This paper proposes and demonstrates a method to obtain macroscopic work out of distributed microactuators fabricated by IC-compatible micromachining processes. We have coordinated the simple and small motion of microactuators in order to perform a task. The concept and a control scheme are discussed first. In order to show the feasibility, the fabrication and operation of arrayed microactuators for conveyors are described. One uses thermally driven cantilevers and the other uses controlled air… CONTINUE READING

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