Graphene and carbon nanotube (CNT) in MEMS/NEMS applications

@inproceedings{Zang2015GrapheneAC,
  title={Graphene and carbon nanotube (CNT) in MEMS/NEMS applications},
  author={Xining Zang and Qin Zhou and Jiyoung Chang and Yumeng Liu and Liwei Lin},
  year={2015}
}
Display Omitted Synthesis methods of graphene and carbon nanotube (SWNT and MWNT).Application of graphene and CNT in NEMS/MEMS including FET, resonator, sensors and actuators.Integrate graphene/CNT nano structure with micro scale system.Local synthesis to construct graphene or CNT together with other components and electronics on the same wafer.Transfer high quality graphene or CNT onto different substrate for the integration with other components. Carbon based nanomaterials, including one… CONTINUE READING

Citations

Publications citing this paper.
SHOWING 1-10 OF 25 CITATIONS

Plasma deposition of carbon-silicon nanocomposite for microelectromechanical applications

  • International Conference on Micro- and Nano-Electronics
  • 2019
VIEW 8 EXCERPTS
CITES BACKGROUND
HIGHLY INFLUENCED