Grand in purpose insignificant in size

  title={Grand in purpose insignificant in size},
  author={W. S. Trimmer},
  journal={Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots},
  • W. Trimmer
  • Published 26 January 1997
  • Engineering, Art
  • Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
The field of micromechanics (also called MEMS or Micro System Technology or Micro Machines) describes a whole new realm of human endeavor. The author discusses the past developments of this technology and considers future trends and prospects. 
Trends and trajectories in MEMS-related technologies: an analysis on the basis of patent application data
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  • Engineering
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Despite its potential to change products and processes widely across industries, microelectromechanical systems (MEMS) are often overlooked by political and popular attention. In this study it is
Future Warfare and the Decline of Human Decisionmaking
  • Thomas K. Adams
  • Political Science
    The US Army War College Quarterly: Parameters
  • 2001
To date, most warfare has taken place within what Robert J. Bunker terms "human space," meaning the traditional four-dimensional battlespace that is discernible to the human senses. (1) In essence,
Etude et conception de microsystèmes micro-usinés par la face avant en utilisant des technologies standards des circuits intégrés sur arséniure de gallium
L'interet et le developpement des microsystemes aujourd'hui sont bases sur les memes principes qui ont fait le succes des circuits integres. Comme dans la microelectronique, le silicium est le


Infinitesimal machinery
The author discusses the sacrificial-layer method of making silicon micromotors, the use of electrostatic actuation, and the importance of friction and contact sticking in such devices. The
Real three dimensional micro fabrication using stereo lithography and metal molding
A technique for three-dimensional micro fabrication using stereo lithography is proposed. It is called the IH process (integrated hardened polymer stereo lithography) and is suitable for
Anisotropic etching of silicon
  • K. Bean
  • Physics
    IEEE Transactions on Electron Devices
  • 1978
Anisotropic etching of silicon has become an important technology in silicon semiconductor processing during the past ten years. It will continue to gain stature and acceptance as standard processing
Fabrication of hemispherical structures using semiconductor technology for use in thermonuclear fusion research
Initial investigations and laboratory experiments in the area of target fabrication using solid state circuit processing techniques to create special target components have indicated the feasibility
The resonant gate transistor
A device is described which permits high- Q frequency selection to be incorporated into silicon integrated circuits. It is essentially an electrostatically excited tuning fork employing field-effect
Photoforming applied to fine machining
  • T. Takagi, N. Nakajima
  • Materials Science
    [1993] Proceedings IEEE Micro Electro Mechanical Systems
  • 1993
Photoforming refers to optical forming methods such as stereolithography, photomask layering, and the 1H process. In these processes, a special liquid resin is used as forming material and solidified
There's plenty of room at the bottom
I experimental physicists must often look with envy at men like Kamerlingh Onnes, who discovered a field like low temperature, which seems to be bottomless and in which one can go down and down. Such
Micro Machining by Machine Tools," MEMS
  • Workshop on Micro Electro
  • 1993
There's Plenty of Room a t the Bottom," Caltech's Engineering
  • Science magazine, February,
  • 1960