Geometric effects on thermoelastic damping in MEMS resonators

@inproceedings{Yi2007GeometricEO,
  title={Geometric effects on thermoelastic damping in MEMS resonators},
  author={Young Byung Yi},
  year={2007}
}
The effects of geometry on the energy dissipation induced by thermoelastic damping in MEMS resonators are investigated numerically using a finite element formulation. The perturbation analysis is applied to derive a linear eigenvalue equation for the exponentially decaying rate of the mechanical oscillation. The analysis also involves a Fourier method that… CONTINUE READING