Generation of a Metamodel for a Micromachined Accelerometer using T-SPICETM and the IZ-Optimality Option of I-OPTTM


We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE using T-SPICE. A five-factor microaccelerometer example demonstrates that highly accurate dynamical simulations are… (More)


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