Gauges for Definition of Oxygene Permeability of Protective Films for Surfaces of Microelectronic Devices

@article{Domantsevich2006GaugesFD,
  title={Gauges for Definition of Oxygene Permeability of Protective Films for Surfaces of Microelectronic Devices},
  author={N. Domantsevich and B. Yatsyshin and Olena Igorivna Aksimentyeva},
  journal={2006 International Conference - Modern Problems of Radio Engineering, Telecommunications, and Computer Science},
  year={2006},
  pages={672-672}
}
The methods and results of the definition of gas permeability of protective polymer films on the surface of microelectronic devices has been described. It found that improving of protection is observed at low content of modification components in the polymer composition. 

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