Gas spectrometry based on pyroelectric thin film arrays integrated on silicon

@article{Willing1997GasSB,
  title={Gas spectrometry based on pyroelectric thin film arrays integrated on silicon},
  author={Bruce Willing and Markus Kohli and Paul Muralt and Nava Setter and O. Oehler},
  journal={Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)},
  year={1997},
  volume={2},
  pages={1245-1248 vol.2}
}
We report on a novel gas spectrometry technique using pyroelectric thin film arrays. The 1/spl times/50 element arrays of PZT are integrated onto silicon using a membrane structure. The experimental characterization of the pyroelectric elements show both high voltage and current responses in defined frequency ranges. Mounting the array as a detector in a commercial spectrometer, we demonstrate its capability of detecting the infrared absorption lines of gases by the example of CO/sub 2/. 

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Applications of pyroelectric materials in array-based detectors

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