Gas-phase silicon micromachining with xenon difluoride

  title={Gas-phase silicon micromachining with xenon difluoride},
  author={F. Chang and R. Yeh and G. Lin and P. B. Chu and E. Hoffman and E. Kruglick and K. Pister and M. Hecht},
  booktitle={Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components},
  • F. Chang, R. Yeh, +5 authors M. Hecht
  • Published in
    Photonics West - Micro and…
  • Physics, Engineering
  • Xenon difluoride is a gas phase, room temperature, isotropic silicon etchant with extremely high selectivity to many materials commonly used in microelectromechancial systems, including photoresists, aluminum, and silicon dioxide. Using a simple vacuum system, the effects of etch aperture and loading were explored for etches between 10 and 200 micrometers . Etch rates as high as 40 micrometers /minute were observed. Initial characteriation of wafer surface temperature during the etch indicates… CONTINUE READING
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