Gas breakdown in an atmospheric pressure radio-frequency capacitive plasma source

@inproceedings{Park2001GasBI,
  title={Gas breakdown in an atmospheric pressure radio-frequency capacitive plasma source},
  author={Jaeyoung Park and Ivars Henins and Hans Wilhelm Herrmann and Gary S. Selwyn},
  year={2001}
}
Gas breakdown is studied in an atmospheric pressure rf capacitive plasma source developed for materials applications. At a rf frequency of 13.56 MHz, breakdown voltage is largely a function of the product of the pressure and the discharge gap spacing, approximating the Paschen curve. However, breakdown voltage varies substantially with rf frequency due to a change in the electron loss mechanism. A large increase in breakdown voltage is observed when argon, oxygen, or nitrogen is added to helium… CONTINUE READING

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References

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Zh . Tekh . Fiz . 38 , 1016 ~ 1968 !

R. Etemadi