Gas Sensing Response Improvement of Well-Aligned TiO2 Nanowires Array

@article{Francioso2006GasSR,
  title={Gas Sensing Response Improvement of Well-Aligned TiO2 Nanowires Array},
  author={Luca Francioso and A. Taurino and A. Forleo and Pietro Siciliano and M. Epifani},
  journal={2006 5th IEEE Conference on Sensors},
  year={2006},
  pages={464-465}
}
Fast and cheap nanofabrication process of titania (TiO2) nanowires array with lateral dimensions width ranging from 90 to 180 nm and 1.4 mm in length is presented. In spite of typical pattern transfer techniques for submicron fabrication, this work focused on a 365 nm UV photolithographic process to obtain long nanowires of sol-gel nanostructured titania… CONTINUE READING