GaAs MQW modulators integrated with silicon CMOS

  title={GaAs MQW modulators integrated with silicon CMOS},
  author={Keith W. Goossen and J. Michael Walker and L. A. D'Asaro and S. Hui and B. Tseng and R E Leibenguth and D. Kossives and D. Bacon and D. Dahringer and L.M.F. Chirovsky and A. L. Lentine and D. A. B. Miller},
  journal={IEEE Photonics Technology Letters},
We demonstrate integration of GaAs-AlGaAs multiple quantum well modulators to silicon CMOS circuitry via flip-chip solder-bonding followed by substrate removal. We obtain 95% device yield for 32/spl times/32 arrays of devices with 15 micron solder pads. We show operation of a simple circuit composed of a modulator and a CMOS transistor.<<ETX>> 


Publications referenced by this paper.
Showing 1-10 of 10 references

4 X 4 arrays of FET-SEED embedded control 2 x 1 optoelectronic switching nodes with electrical fan-out,

G. Livescu, S. Hui, +5 authors T. K. Woodward
1EEE Photon. Technol. Lett., • 1994

In - GaAs - InP pi ( MQW ) - n surface normal electroabsorption modulators exhibiting better than 8 : l contrast ratio for 1 . 55 Ltm applications grown by gas - source MBE , ” IEEE Photon

J. E. Cunningham, W. Y. Jan

The importance of material selection for flip chip on board assemblies

J. Giesler G. O’Malley, S. Machuga

Batch fabrication and operation of GaAs - AIGaAs field - effect transistor - self - electro - optic effect device ( FET - SEED ) smart pixel arrays , ” 1 EEE . I , Quantum Electron

L. M. F. Chirovsky, E. J. Laskowski, +7 authors L. E. Smith

Optical receiver array in silicon bipolar technology with self - aligned , low parasitic IIIN detectors for DC - 1 Gbit / s parallel links

H. Melchior J. Wieland, M. Q. Kearley, +3 authors R. C. Goodfellow
Electron . Lett . • 1991

4 X 4 arrays of FET - SEED embedded control 2 x 1 optoelectronic switching nodes with electrical fan - out , ” 1 EEE Photon

R. A. Novotny A. L. Lentine, T. J. Cloonan, +8 authors K. G. Glogovsky

A two kbit array of symmetric self - electro - optic effect devices

F. B. McCormick A. L. Lentine, R. A. Novotny, +4 authors G. D. Boyd