Fundamental Aspects of Ion Beam Assisted Deposition of Magnesium Oxide Template Films

Abstract

The nucleation and growth of magnesium oxide (MgO) deposited using the ion beam-assisted deposition (IBAD) technique was investigated using a specially designed <i>in-situ</i> quartz crystal microbalance (QCM), which acted as the substrate during deposition. The mass accumulation of the growing film was collected while simultaneous reflected high-energy… (More)

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@article{Groves2009FundamentalAO, title={Fundamental Aspects of Ion Beam Assisted Deposition of Magnesium Oxide Template Films}, author={J R Groves and R. F. DePaula and Laura Stan and R. H. Hammond and B. M. Clemens}, journal={IEEE Transactions on Applied Superconductivity}, year={2009}, volume={19}, pages={3311-3314} }