From the Store Shelf to Device-Level Atom Probe Analysis: An Exercise in Feasibility

@inproceedings{Clifton2011FromTS,
  title={From the Store Shelf to Device-Level Atom Probe Analysis: An Exercise in Feasibility},
  author={P. Clifton and Dan Lawrence and D. J. Larson and Williams Lefebvre and Dustin Z. Olson and Ty J. Prosa and D. Reinhard and Robert M. Ulfig and Isabelle Porto San Mart{\'i}n and Thomas F. Kelly},
  year={2011}
}
Over the past several decades, resolving semiconductor device features and defects has been primarily achieved through use of electron microscopy (TEM, SEM, etc.), ion spectroscopy (SIMS), various X-ray technologies, and some light-optical techniques. As the industry has moved into the nanoelectronics realm, the utilization of these methods has become more challenging due to the scale of the devices of interest and limitations of these standard techniques within the industry. Over the past few… CONTINUE READING

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