From MEMS Devices to Smart Integrated Systems

@article{Soeraasen2007FromMD,
  title={From MEMS Devices to Smart Integrated Systems},
  author={O. Soeraasen and J. E. Ramstad},
  journal={CoRR},
  year={2007},
  volume={abs/0802.3094}
}
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts in an ordinary CMOS process. This procedure has been used to design an oscillator consisting of a resonating cantilever… CONTINUE READING