Frequency Transition Phenomenon of Self-Oscillated Micro-Cantilever by Changing Driving Voltage

@article{Mita2007FrequencyTP,
  title={Frequency Transition Phenomenon of Self-Oscillated Micro-Cantilever by Changing Driving Voltage},
  author={Moeko Mita and Manabu Ataka and Takahiro Ishida and Hidemasa Fujita and H. Toshiyosh},
  journal={TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2007},
  pages={1155-1158}
}
We have found an interesting phenomenon of self-excited oscillation of electrostatic microcantilever; the device was found to be self-oscillated under an applied dc voltage, by repeating charge and discharge between the fixed and the movable electrodes. Oscillation frequency is changed by changing apply dc voltage. The phenomenon can be used to make a MEMS… CONTINUE READING