Frequency Modulated Mems Gyroscopes: Recent Developments, Challenges and Outlook

@article{Langfelder2019FrequencyMM,
  title={Frequency Modulated Mems Gyroscopes: Recent Developments, Challenges and Outlook},
  author={Giacomo Langfelder and Paolo Minotti and Valentina Zega and Claudia Comi and Cristiano Rocco Marra and Mauro Leoncini and Marco Bestetti},
  journal={2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)},
  year={2019},
  pages={425-429}
}
  • Giacomo Langfelder, Paolo Minotti, +4 authors Marco Bestetti
  • Published in
    20th International Conference…
    2019
  • Computer Science
  • After more than ten years of researches by different groups, this work summarizes the various frequency-modulated techniques for microelectromechanical system (MEMS) based gyroscopes. It then focuses on the low-power integrated electronics for Lissajous FM angular rate sensors and on the conditions to guarantee high offset stability over temperature. Recent results in terms of scale-factor drift and offset drift over temperature on the first complete Lissajous yaw FM gyroscope with full digital… CONTINUE READING

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