Frequency-Modulated Lorentz Force Magnetometer With Enhanced Sensitivity via Mechanical Amplification

  title={Frequency-Modulated Lorentz Force Magnetometer With Enhanced Sensitivity via Mechanical Amplification},
  author={Mo Li and Sarah H. Nitzan and David A. Horsley},
  journal={IEEE Electron Device Letters},
This letter presents a micromachined silicon Lorentz force magnetometer, which consists of a flexural beam resonator coupled to current-carrying silicon beams via a microleverage mechanism. The flexural beam resonator is a force sensor, which measures the magnetic field through resonant frequency shift induced by the Lorentz force, which acts as an axial load. Previous frequency-modulated Lorentz force magnetometers suffer from low sensitivity, limited by both fabrication restrictions and lack… CONTINUE READING


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