Frequency Effect on Voltage Linearity of $ \hbox{ZrO}_{2}$-Based RF Metal–Insulator–Metal Capacitors

  title={Frequency Effect on Voltage Linearity of \$ \hbox\{ZrO\}_\{2\}\$-Based RF Metal–Insulator–Metal Capacitors},
  author={T. Bertaud and S. Blonkowski and Cex0301dric Bermond and Christophe Vall{\'e}e and Patrice Gonon and M. Gros-Jean and Bernard Fl{\'e}chet},
  journal={IEEE Electron Device Letters},
This letter deals with the electrical and wideband frequency characterizations of metal-insulator-metal capacitors integrating medium-¿ material, ZrO2. In particular, this letter focuses on the frequency effect on the voltage linearity of these capacitors and material. The dependence of the voltage-capacitance coefficient (VCC) ¿ is, for the first time, studied from 1 kHz to 1 GHz. Intrinsic or extrinsic material origin of the VCC are discussed. 


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