Formation of a plano-convex micro-lens array in fused silica glass by using a CO2 laser-assisted reshaping technique

  title={Formation of a plano-convex micro-lens array in fused silica glass by using a CO2 laser-assisted reshaping technique},
  author={Ik-Bu Sohn and Dong-yoon Yoo and Young Chul Noh and Jae Hee Sung and Seong Ku Lee and Hun-Kook Choi and Md. Shamim Ahsan},
  journal={Journal of the Korean Physical Society},
We report on fabricating high-fill-factor plano-convex spherical and square micro-lens arrays on fused silica glass surface by using a CO2 laser-assisted reshaping technique. Initially, periodic micro-pillars are encoded on glass surfaces by means of a femtosecond laser beam, afterwards, the micro-pillars are polished several times by irradiating a CO2 laser beam on top of the micro-pillars. Consequently, a spherical micro-lens array with micro-lens size of 50 μm × 50 μm and a square micro-lens… 

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