Formation and microstructural properties of locally distributed ZnSiO3 nanoparticles embedded in a SiO2 layer by using a focused electron beam.

@article{Shin2008FormationAM,
  title={Formation and microstructural properties of locally distributed ZnSiO3 nanoparticles embedded in a SiO2 layer by using a focused electron beam.},
  author={J. W. Shin and Young Soo No and Tae Whan Kim and Won Kook Choi},
  journal={Journal of nanoscience and nanotechnology},
  year={2008},
  volume={8 10},
  pages={5566-70}
}
Locally distributed crystalline ZnSiO3 nanoparticles embedded in a SiO2 layer inserted between the ZnO thin film and the Si substrate were formed using transmission electron microscopy (TEM) with a focused electron beam irradiation process. High-resolution TEM (HRTEM) images and energy dispersive X-ray spectroscopy (EDS) profiles showed that ZnSiO3… CONTINUE READING