Focussed ion beam fabrication of large and complex nanopatterns

  title={Focussed ion beam fabrication of large and complex nanopatterns},
  author={Oliver Wilhelmi and Laurent Roussel and Peter L. Faber and Steve Reyntjens and Gheorghe Daniel},
The fabrication of nanopatterns with a focussed ion beam (FIB) has recently been expanded to more complex nanopatterns with large numbers of individual pattern elements and covering larger pattern areas. We present two examples of FIB-fabricated large and complex nanopatterns and describe the key aspects of the underlying process automation. The FIB-fabrication has been carried out on DualBeam™ instruments, which combine the FIB with a scanning electron microscope in one single instrument. We… CONTINUE READING