Focussed ion beam fabrication of large and complex nanopatterns

@article{Wilhelmi2010FocussedIB,
  title={Focussed ion beam fabrication of large and complex nanopatterns},
  author={Oliver Wilhelmi and Laurent Roussel and Peter L. Faber and Steve Reyntjens and Gheorghe Daniel},
  journal={Journal of Experimental Nanoscience},
  year={2010},
  volume={5},
  pages={244 - 250}
}
  • Oliver Wilhelmi, Laurent Roussel, +2 authors Gheorghe Daniel
  • Published 2010
  • Materials Science
  • Journal of Experimental Nanoscience
  • The fabrication of nanopatterns with a focussed ion beam (FIB) has recently been expanded to more complex nanopatterns with large numbers of individual pattern elements and covering larger pattern areas. We present two examples of FIB-fabricated large and complex nanopatterns and describe the key aspects of the underlying process automation. The FIB-fabrication has been carried out on DualBeam™ instruments, which combine the FIB with a scanning electron microscope in one single instrument. We… CONTINUE READING

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