Focussed ion beam fabrication of large and complex nanopatterns

@article{Wilhelmi2010FocussedIB,
  title={Focussed ion beam fabrication of large and complex nanopatterns},
  author={Oliver Wilhelmi and Laurent Roussel and Pybe Faber and Steve Reyntjens and G. Daniel},
  journal={Journal of Experimental Nanoscience},
  year={2010},
  volume={5},
  pages={244 - 250}
}
The fabrication of nanopatterns with a focussed ion beam (FIB) has recently been expanded to more complex nanopatterns with large numbers of individual pattern elements and covering larger pattern areas. We present two examples of FIB-fabricated large and complex nanopatterns and describe the key aspects of the underlying process automation. The FIB-fabrication has been carried out on DualBeam™ instruments, which combine the FIB with a scanning electron microscope in one single instrument. We… Expand

References

SHOWING 1-7 OF 7 REFERENCES
Rapid Prototyping of Nanostructured Materials with a Focused Ion Beam
State-of-the-art focused ion beam (FIB) technology combined with high-performance scanning electron microscopy (SEM) is making a big impact on nanotechnology, particularly with the ability to useExpand
Focused ion beam iodine-enhanced etching of high aspect ratio holes in InP photonic crystals
The authors investigate the focused ion beam (FIB) fabrication of photonic crystal (PhC) holes in InP combining physical sputtering using 30 keV gallium ions and iodine-enhanced etching at 150 °CExpand
Deep X‐Ray Lithography in the Fabrication Process of a 3D Diffractive Optical Element
We present first results of the fabrication process of a diffractive optical element (DOE) using deep X‐ray lithography. The DOE forms the core of our proposed fast parallel‐processing infraredExpand
Jpn
  • J. Appl. Phys., Vol. 47 No. 6
  • 2008
AIP Conf
  • Proc., Vol. 879 Issue 1,
  • 2007
Sci
  • Technol. B, 25(6)
  • 2007
Junction of two groups of trenches of different depths. The difference in surface roughness between the Si wafer surface and the FIB patterned area is well visible