Focused ion beams techniques for nanomaterials characterization.

  title={Focused ion beams techniques for nanomaterials characterization.},
  author={Richard M. Langford},
  journal={Microscopy research and technique},
  volume={69 7},
Focused ion beam and dual platform systems have, over the last 10 years, become a main stay of sample preparation for material analysis. In this article the merits of using these systems are discussed and the three main techniques used to prepare cross-section specimens for transmission electron microscopy (TEM) are both discussed and compared with emphasis being placed on the tricks that users do to make the lamellae as thin as possible and with a minimum of damage at their sidewalls. Other… CONTINUE READING