Focused ion beam preparation of samples for X-ray nanotomography.


The preparation of hard material samples with the necessary size and shape is critical to successful material analysis. X-ray nanotomography requires that samples are sufficiently thin for X-rays to pass through the sample during rotation for tomography. One method for producing samples that fit the criteria for X-ray nanotomography is focused ion beam… (More)
DOI: 10.1107/S0909049512027252


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