• Materials Science
  • Published 2008

Focused ion beam micromachining of mems

@inproceedings{Ali2008FocusedIB,
  title={Focused ion beam micromachining of mems},
  author={Mohammad Yeakub Ali},
  year={2008}
}
This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanical systems) such as optical elements, trimming of atomic force microscope (AFM) tip, nanopillar, micromilling tool, microcavity for replication is discussed. The trimmed AFM tip was tested in measurement and imaging of high aspect ratio nanopillars where higher accuracy and clarity were observed. Micromilling tool fabricated using FIB sputtering was used in micromilling with desktop milling… CONTINUE READING

Citations

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