Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides

Abstract

We fabricated grating couplers in silicon-on-insulator waveguides with focused-ion-beam. First devices were very lossy, but by using selective etchant and a hard mask we obtained efficiencies comparable to traditional fabrication techniques 

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Cite this paper

@article{Schrauwen2006FocusedIonBeamFV, title={Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides}, author={Jelle Schrauwen and Dries Van Thourhout and R. G. F. Baets}, journal={3rd IEEE International Conference on Group IV Photonics, 2006.}, year={2006}, pages={101-103} }