# Flow Sensor Based on the Snap-Through Detection of a Curved Micromechanical Beam

@article{Kessler2018FlowSB,
title={Flow Sensor Based on the Snap-Through Detection of a Curved Micromechanical Beam},
author={Yoav Kessler and B. Robert Ilic and Slava Krylov and Alexander Liberzon},
journal={Journal of Microelectromechanical Systems},
year={2018},
volume={27},
pages={945-947}
}
• Published 14 June 2018
• Engineering
• Journal of Microelectromechanical Systems
We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating, and the convective air cooling change the beam curvature and consequently, the critical snap-through voltage (<inline-formula> <tex-math notation="LaTeX">$V_{\text {ST}}$ </tex-math></inline-formula>). Using single crystal silicon beams, we demonstrate the snap-through voltage to flow velocity…
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