• DOI:10.1021/nn504393j
• Corpus ID: 21377619

Flexible single-crystal silicon nanomembrane photonic crystal cavity.

@article{Xu2014FlexibleSS,
  title={Flexible single-crystal silicon nanomembrane photonic crystal cavity.},
  author={Xiaochuan Xu and Harish Subbaraman and Swapnajit Chakravarty and Amir Hosseini and John Covey and Yalin Yu and David Nien Kwong and Yang Zhang and Wei-Cheng Lai and Yi Zou and Nanshu Lu and Ray T. Chen},
  journal={ACS nano},
  year={2014},
  volume={8 12},
  pages={
          12265-71
        }
}

• Xiaochuan Xu, H. Subbaraman, +9 authors Ray T. Chen
• Published 24 November 2014
• Physics
• ACS nano

Flexible inorganic electronic devices promise numerous applications, especially in fields that could not be covered satisfactorily by conventional rigid devices. Benefits on a similar scale are also foreseeable for silicon photonic components. However, the difficulty in transferring intricate silicon photonic devices has deterred widespread development. In this paper, we demonstrate a flexible single-crystal silicon nanomembrane photonic crystal microcavity through a bonding and substrate removal approach. The transferred cavity shows a quality factor of 2.2×10(4) and could be bent to a curvature of 5 mm radius without deteriorating the performance compared to its counterparts on rigid substrates. A thorough characterization of the device reveals that the resonant wavelength is a linear function of the bending-induced strain. The device also shows a curvature-independent sensitivity to the ambient index variation.