First principles evaluation of fcc ruthenium for use in advanced interconnects.

@article{Philip2020FirstPE,
  title={First principles evaluation of fcc ruthenium for use in advanced interconnects.},
  author={Timothy M Philip and N. Lanzillo and T. Gunst and T. Markussen and Jonathan Cobb and S. Aboud and R. Robison},
  journal={arXiv: Materials Science},
  year={2020}
}
As the semiconductor industry turns to alternate conductors to replace Cu for future interconnect nodes, much attention as been focused on evaluating the electrical performance of Ru. The typical hexagonal close-packed (hcp) phase has been extensively studied, but relatively little attention has been paid to the face-centered cubic (fcc) phase, which has been shown to nucleate in confined structures and may be present in tight-pitch interconnects. Using \emph{ab initio} techniques, we benchmark… Expand
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