First phase to form during cobalt germanidation

@inproceedings{Rabie2017FirstPT,
  title={First phase to form during cobalt germanidation},
  author={Mohamed A. Rabie and Souzan Mirza and Victoria M. Jarvis and Yaser Mahmoud Haddara},
  year={2017}
}
The first systematic study for the first phase to form during cobalt germanidation was conducted. Hexagonal β-Co5Ge3 was the first phase to form in case of cobalt germanidation on (100) Ge. This phase formed at a temperature as low as 227 °C. Monoclinic CoGe was experimentally shown to be the second phase to form at the same temperature. Our results are contrary to the previous reports suggesting monoclinic CoGe to be the first phase to form. This is mainly due to the experimental setup that… CONTINUE READING

Similar Papers

Topics from this paper.

Citations

Publications citing this paper.

Novel experimentally calibrated multiphase TCAD model for cobalt germanide growth

  • 2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
  • 2017
VIEW 4 EXCERPTS
CITES BACKGROUND, RESULTS & METHODS
HIGHLY INFLUENCED