Finite element simulations of thin-film composite BAW resonators

@article{Makkonen2001FiniteES,
  title={Finite element simulations of thin-film composite BAW resonators},
  author={Tapani Makkonen and A. Holappa and Juha Ella and Magela Salom{\'e}a},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2001},
  volume={48},
  pages={1241-1258}
}
A finite element method (FEM) formulation is presented for the numerical solution of the electroelastic equations that govern the linear forced vibrations of piezoelectric media. A harmonic time dependence is assumed. Both of the approaches, that of solving the field problem (harmonic analysis) and that of solving the corresponding eigenvalue problem (modal analysis), are described. A FEM software package has been created from scratch. Important aspects central to the efficient implementation… 
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