Finite element analysis of the behavior of the scanning microdeformation microscope

@article{Vairac2001FiniteEA,
  title={Finite element analysis of the behavior of the scanning microdeformation microscope},
  author={Pascal Vairac and S. Ballandras and Bernard Cretin},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2001},
  volume={48},
  pages={895-899}
}
The scanning microdeformation microscope, as many other scanning probe microscopes developed in the last years, is a kind of ac force microscope using the near-field acoustic interaction. The heart of the system is an electromechanical oscillator made of a silicon cantilever, a diamond or sapphire tip, associated with a bimorph piezoelectric transducer and a specific amplifier. The specificity of the system is the way of detection of the oscillation frequency performed electrically through the… CONTINUE READING