Finite element analysis of the attractive force on a Coulomb type electrostatic chuck

@article{Yoo2007FiniteEA,
  title={Finite element analysis of the attractive force on a Coulomb type electrostatic chuck},
  author={Jeonghoon Yoo and Jae-Seok Choi and S. Hong and Tae-Hyun Kim and Sung Jin Lee},
  journal={2007 International Conference on Electrical Machines and Systems (ICEMS)},
  year={2007},
  pages={1371-1375}
}
The electrostatic chuck (ESC) offers several advantages compared with mechanical holding systems because it can hold a flat object, resulting in flattening of semiconductor wafers and liquid-crystal display (LCD) panels without surface contamination and particle generation. This research tries to compute the attractive force between the Coulomb type ESC and the LCD panel using the finite element (FE) analysis and confirms the influence of the air gap upon the attractive force. The air gap… CONTINUE READING