Fine-hole drilling in Upilex polyimide and glass by TEA laser ablation

@inproceedings{Dyer1997FineholeDI,
  title={Fine-hole drilling in Upilex polyimide and glass by TEA laser ablation},
  author={Phillip E. Dyer and Ingo Waldeck and Gordon C. K. Roberts},
  year={1997}
}
Small-scale hole formation in Upilex polyimide and soda-lime glass using TEA laser ablation is reported. Hole dimensions as small as produced in the polyimide suggest optical resolution rather than thermal degradation effects limit the feature size attainable in infrared TEA laser polymer ablation.