Film Bulk Acoustic-wave Resonator (FBAR) based infrared sensor

Abstract

This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic-wave Resonator (FBAR). The resonant frequency of FBAR sensor downshifts linearly when there is IR (peak wavelength at 780nm) illumination on the device. This effect attributed to the temperature sensitivity of the FBAR. The noise equivalent temperature difference (NETD) and… (More)
DOI: 10.1109/NEMS.2010.5592244

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Cite this paper

@article{Wang2010FilmBA, title={Film Bulk Acoustic-wave Resonator (FBAR) based infrared sensor}, author={Ziyu Wang and Xiaotun Qiu and Jonathon Oiler and Jie Zhu and Hongyu Yu}, journal={2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems}, year={2010}, pages={824-827} }