Field Emission Properties of Pt Nanopillar Arrays Formed by Focused Ion Beams Induced Deposition

@article{Jin2006FieldEP,
  title={Field Emission Properties of Pt Nanopillar Arrays Formed by Focused Ion Beams Induced Deposition},
  author={A. Z. Jin and Qiming Jane Wang and Y. L. Li and H. F. Yang and J. Li and Qiang Luo and Zheng Cui and C Z Gu},
  journal={2006 19th International Vacuum Nanoelectronics Conference},
  year={2006},
  pages={129-130}
}
In this work, the nanofabrication of Pt nanopillar arrays with various geometries as field emitters was studied and their field emission properties were measured. Pt nanopillar arrays were fabricated on Si (100) substrate by FIB assisted chemical vapor deposition (CVD) method in a FEI DB235 dual-beam system, which is based on the principle of focusing an ion beam on the surface of a substrate in an organometallic precursor gas of C9H16Pt. For obtaining the nanopillar arrays with various… CONTINUE READING