Ferroelectric-based electrostatic micromotors with nanometer gaps

  title={Ferroelectric-based electrostatic micromotors with nanometer gaps},
  author={E. G. Kostsov},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  • E.G. Kostsov
  • Published 2006 in
    IEEE Transactions on Ultrasonics, Ferroelectrics…
The design of the capacitive motors that are based on the electrostatic rolling of the thin metallic film on the ferroelectric surface is studied. It is shown that this method of energy conversion allows one to move the main stage of electromechanical energy conversion into the nanometer range when using the materials with high dielectric permeability (more than 500). The analysis of the distribution of the forces and field in the nanometer gap of the electrostatic micromotors is carried out… CONTINUE READING

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