Femtosecond laser-assisted three-dimensional microfabrication in silica.

@article{Ius2001FemtosecondLT,
  title={Femtosecond laser-assisted three-dimensional microfabrication in silica.},
  author={A Marcinkevi Ius and Saulius Juodkazis and Makoto Watanabe and Motoatsu Miwa and Shoichiro Matsuo and Hiroaki Misawa and Junji Nishii},
  journal={Optics letters},
  year={2001},
  volume={26 5},
  pages={277-9}
}
We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps:(i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique… CONTINUE READING

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