Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass

@inproceedings{He2014FemtosecondLF,
  title={Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass},
  author={Fei He and Yang Liao and Jintian Lin and Jiangxin Song and Lingling Qiao and Ya Cheng and Koji Sugioka},
  booktitle={Sensors},
  year={2014}
}
Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro- and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic sensors for biochemical applications. The present paper presents a comprehensive review of recent advancements in femtosecond laser processing of glass for a variety of microfluidic sensor applications… CONTINUE READING