Feedforward control of a piezoelectric flexure stage for AFM

  title={Feedforward control of a piezoelectric flexure stage for AFM},
  author={Yang Li and John Bechhoefer},
  journal={2008 American Control Conference},
We review basic issues in the control of scanning probe microscopes. To improve the performance of the present generation of instruments, we have developed a simple feedforward technique that nonetheless increases the effective bandwidth of the positioning stage by a factor of 15 over its standard operation. If the desired control signal is known in advance (as it is for a periodic scan signal), the feedforward filter can be non-causal: information about the future can be used to cancel the… CONTINUE READING
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