Features of micron-sized mesa-piezoresistor

@article{Gridchin2010FeaturesOM,
  title={Features of micron-sized mesa-piezoresistor},
  author={Victor A. Gridchin and Michail A. Chebanov},
  journal={2010 11th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices},
  year={2010},
  pages={124-127}
}
The effect of dihedral angles in the junction region of tensoresistive layer to contact pads on strain distribution in mesa-piezoresistor body was studied using the finite element method. Influence of mesa-piezoresistor geometry on its sensitivity was demonstrated. 

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