Fatigue Degradation Properties of LIGA Ni Films Using Kilohertz Microresonators

Abstract

A micrometer-scale ultrasonic fatigue characterization technique is introduced to investigate the fatigue degradation properties of LIGA Ni structural films in the very high cycle fatigue regime. Kilohertz microresonators fabricated with the MetalMUMPs process were driven at resonance (~ 8 kHz) in controlled environments (30 <sup>&#x00B0;</sup>C , 50… (More)

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Cite this paper

@article{Baumert2013FatigueDP, title={Fatigue Degradation Properties of LIGA Ni Films Using Kilohertz Microresonators}, author={E. K. Baumert and O. N. Pierron}, journal={Journal of Microelectromechanical Systems}, year={2013}, volume={22}, pages={16-25} }