Fast optical phased array with ultra-lightweight high-contrast-grating mirrors

  title={Fast optical phased array with ultra-lightweight high-contrast-grating mirrors},
  author={Byung-wook Yoo and Trevor Chan and Mischa Megens and Tianbo Sun and Weijian Yang and Frank Rao and Connie J. Chang-Hasnain and David A. Horsley and M. C. Wu},
  journal={2012 International Conference on Optical MEMS and Nanophotonics},
  • B. Yoo, T. Chan, +6 authors M. Wu
  • Published 4 October 2012
  • Materials Science
  • 2012 International Conference on Optical MEMS and Nanophotonics
We report an optical phased array (OPA) using high-contrast-grating (HCG) as an electrostatically actuated mirror for the purpose of free space fast beamsteering. In this paper, several attractive properties of HCG mirror are introduced such as single material, high reflectance along a wide bandwidth and low-mass inertia and the fabrication result is shown. ±10° × 10° with 2° beam width is observed at 1550 nm wavelength using HCG optical phased array. 

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