Fast flexible electronics using transferrable silicon nanomembranes

  title={Fast flexible electronics using transferrable silicon nanomembranes},
  author={Kan Zhang and Jung‐Hun Seo and Weidong Zhou and Zhenqiang Jack Ma},
  journal={Journal of Physics D},
A systematic review, covering the aspects of material preparation, device fabrication and process integration, is provided for flexible electronics operating in high-frequency domain based on transferrable monocrystalline silicon (Si) nanomembranes (NM). Previously demonstrated methods of releasing Si NM from silicon-on-insulator source substrates and transferring it to flexible substrates are briefly described. Due to the processing temperature limitation of most flexible substrates, a pre… 
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