Fast flexible electronics using transferrable silicon nanomembranes

@article{Zhang2012FastFE,
  title={Fast flexible electronics using transferrable silicon nanomembranes},
  author={Kan Zhang and J. Seo and Weidong Zhou and Z. Ma},
  journal={Journal of Physics D},
  year={2012},
  volume={45},
  pages={143001}
}
A systematic review, covering the aspects of material preparation, device fabrication and process integration, is provided for flexible electronics operating in high-frequency domain based on transferrable monocrystalline silicon (Si) nanomembranes (NM). Previously demonstrated methods of releasing Si NM from silicon-on-insulator source substrates and transferring it to flexible substrates are briefly described. Due to the processing temperature limitation of most flexible substrates, a pre… Expand
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78 Citations
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78 Citations

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