Fast flexible electronics using transferrable silicon nanomembranes

  title={Fast flexible electronics using transferrable silicon nanomembranes},
  author={Kan Zhang and J. Seo and Weidong Zhou and Z. Ma},
  journal={Journal of Physics D},
  • Kan Zhang, J. Seo, +1 author Z. Ma
  • Published 2012
  • Materials Science
  • Journal of Physics D
  • A systematic review, covering the aspects of material preparation, device fabrication and process integration, is provided for flexible electronics operating in high-frequency domain based on transferrable monocrystalline silicon (Si) nanomembranes (NM). Previously demonstrated methods of releasing Si NM from silicon-on-insulator source substrates and transferring it to flexible substrates are briefly described. Due to the processing temperature limitation of most flexible substrates, a pre… CONTINUE READING
    77 Citations

    Figures from this paper

    Fast Flexible Transistors with a Nanotrench Structure
    • 18
    • PDF
    Fast flexible electronics with strained silicon nanomembranes
    • 95
    • PDF
    Fast flexible thin-film transistors with deep submicron channel enabled by nanoimprint lithography
    • 2
    Flexible Si BiCMOS on plastic substrates
    • J. Seo, Kan Zhang, W. Zhou, Z. Ma
    • Materials Science
    • 2017 IEEE 17th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF)
    • 2017
    Si microwires based FETs on flexible substrates
    • 1
    Radio-frequency flexible electronics: Transistors and passives
    • J. Seo, Z. Ma, W. Zhou
    • Materials Science
    • 2014 IEEE Bipolar/BiCMOS Circuits and Technology Meeting (BCTM)
    • 2014
    • 1


    Microwave thin-film transistors using Si nanomembranes on flexible polymer substrate
    • 128
    Flexible Electronics: Materials and Applications
    • 365
    Smart-Cut® technology: from 300 mm ultrathin SOI production to advanced engineered substrates
    • 59
    Fabrication Process for Josephson Integrated Circuits
    • 181
    • PDF
    High-speed strained-single-crystal-silicon thin-film transistors on flexible polymers
    • 122