Fast Direct Write E-Beam 16K Static RAM

Abstract

The trend towards finer geometries and higher density circuits has made CMOS technology, with its low power dissipation and high noise margin, increasingly attractive for state-of-the-art integrated circuits. CMOS can also be a high performance technology. A 16K bit Static RAM has been designed, built and tested in a 0.5um-gate direct-write E-Beam… (More)

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