Failure analysis of MEMS RF cantilevered beam switch

  title={Failure analysis of MEMS RF cantilevered beam switch},
  author={Fangmin Guo and Xin Xu and Chengshi Li and Yuping Ge and Jian-guo Yu and Peisheng Xin and Rongjin Zhu and Zongshen Lai and Ziqiang Zhu and Wei Er Lu},
  booktitle={International Conference on Thin Film Physics and Applications},
  • Fangmin Guo, Xin Xu, +7 authors Wei Er Lu
  • Published in
    International Conference on…
  • Engineering
  • A surface MEMS miniature switch with the cantilevered arm has been made on low resistivity Si substrate. The switch was inserted into a time domain setup and their lifetimes have been characterized as a function of actuated voltage, demonstrating some relationship among lifetime and threshold voltage. The structure of MEMS RF switch is simulated by ANSYS software, doing some failure analysis and discussing difference comparing the experiment. 

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