Failure Mechanisms in MEMS

  title={Failure Mechanisms in MEMS},
  author={Jeremy A. Walraven},
MEMS components by their very nature have different and unique failure mechanisms than their macroscopic counterparts. This paper discusses failure mechanisms observed in various MEMS components and technologies. MEMS devices fabricated using bulk and surface micromachining process technologies are emphasized. 
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Failure analysis of MEMS electrostatic drop ejectors

  • J. A. Walraven, P. C. Galambos, E. I. Cole, A. A. Pimentel, G. Roller, A. Gooray
  • Proc. 27 ISTFA, 2001, pp. 365-372.
  • 2001
1 Excerpt

The Effect of Humidity on the a c 10 μm b 10 μm 5 μm Paper 33.1 832 Reliability of a Microengine

  • D. M. Tanner, J. A. Walraven, +5 authors S. L. Miller
  • Proceedings of IRPS, San Diego CA,
  • 1999
1 Excerpt

Weschsung, “Inkjet Printheads: An example of MST market reality

  • R. N. Unal
  • Micromachine Devices,
  • 1998
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