Failure Mechanisms in MEMS

@inproceedings{Walraven2003FailureMI,
  title={Failure Mechanisms in MEMS},
  author={Jeremy A. Walraven},
  booktitle={ITC},
  year={2003}
}
MEMS components by their very nature have different and unique failure mechanisms than their macroscopic counterparts. This paper discusses failure mechanisms observed in various MEMS components and technologies. MEMS devices fabricated using bulk and surface micromachining process technologies are emphasized. 
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