Failure Analysis of Local Electrodes

  title={Failure Analysis of Local Electrodes},
  author={K. F. Russell and M. K. Miller},
  journal={2006 19th International Vacuum Nanoelectronics Conference},
  • K.F. Russell, M. K. Miller
  • Published in
    19th International Vacuum…
  • Physics
  • A failure analysis of local electrodes has been performed with the use of a dual beam ion miller/scanning electron microscope. Each aperture was examined before and after use in the local electrode atom probe. In addition, many atom probe specimens were characterized after the experiment to correlate the condition of the specimen with that of the aperture. The predominant failure mode of specimens was found to be melting even for high melting point materials such as tungsten and superalloys. A… CONTINUE READING

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