Facile fabrication of suspended as-grown carbon nanotube devices

@article{Sangwan2008FacileFO,
  title={Facile fabrication of suspended as-grown carbon nanotube devices},
  author={Vinod K. Sangwan and Vincent W. Ballarotto and Michael S. Fuhrer and Ellen D. Williams},
  journal={Applied Physics Letters},
  year={2008},
  volume={93},
  pages={113112}
}
affects both the transport 1,2 and noise characteristics. 3 Thus, suspended CNT-FETs, in which direct contact with the dielectric is absent, have the potential for improved control and performance. However, fabrication methods for suspending CNTs demonstrated to date are arduous, and either involve harsh chemical treatment or severely limit the materials which may be used. One approach is to selectively etch the dielectric layer underneath the CNTs to produce a suspended device. 3 This… 

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