Facile Transferring of Wafer-Scale Ultrathin Alumina Membranes onto Substrates for Nanostructure Patterning.

Abstract

Ordered nanostructure arrays have attracted intensive attention because of their various applications. However, it is still a great challenge to achieve ordered nanostructure patterning over a large area (such as wafer-scale) by a technique that allows high throughput, large pattern area and low equipment costs. Here, through a unique design of the… (More)
DOI: 10.1021/acsnano.5b03789

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Cite this paper

@article{AlHaddad2015FacileTO, title={Facile Transferring of Wafer-Scale Ultrathin Alumina Membranes onto Substrates for Nanostructure Patterning.}, author={Ahmed Al-Haddad and Zhibing Zhan and Chengliang Wang and Samar Tarish and Ranjith Vellacheria and Yong Lei}, journal={ACS nano}, year={2015}, volume={9 8}, pages={8584-91} }