Fabrication of very large 2,6m x 2,2m amorphous silicon solar modules on glass


The fabrication of very large photovoltaic thin film modules based on hydrogenated amorphous silicon (a-Si: H) technology on float glass is presented. The different production steps are explained. These are plasma enhanced chemical vapor deposition of a-Si: H films in a 2.6m x 2.2m capacitive plasma reactor, transparent conductive oxide (TCO) and metal… (More)


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